Selective laser melting of high aspect ratio 3D nickel - titanium structures for MEMS applications

摘要

Selective laser melting has been used to build high aspect ratio, three-dimensional NiTi components for the first time. The influence of laser dwell time and raster pitch on the density of NiTi shape memory alloy parts and their resolvable feature sizes are reported. The properties of shape memory springs produced by this method are reported and the application of selective laser melted NiTi components in microelectromechanical devices is discussed.