Interferometer Type Pressure Microsensor

摘要

In this work, the fabrication of waveguide and nitride silicon membrane is presented. The measurement configuration chosen to detect the variation produced in the light properties is an Interferometer configuration of the Mach Zehnder Type (MZI), because of its high sensitivity. One of its arms is positioned on a floating silicon nitride membrane that becomes deformed under small pressures on the range of MPa. According to the parameters of the membrane and the waveguide we obtain a maximum deformation of 176 nm that produces a change of phase of 180° between the two waves, producing therein a null interferometer output for the maximum pressure. The analyses of theory suggest that this device will be able to sense a pressure value up to13.376MPa.