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PRESSURE SENSOR FOR FABRIC-FERRO INTERFEROMETER HAVING SUBMINIATURE TYPE HIGH SENSITIVITY OPTICAL FIBERS AND PRESSURE MEASURING DEVICE
PRESSURE SENSOR FOR FABRIC-FERRO INTERFEROMETER HAVING SUBMINIATURE TYPE HIGH SENSITIVITY OPTICAL FIBERS AND PRESSURE MEASURING DEVICE
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机译:具有超小型微型高灵敏度光纤和压力测量装置的纤维-铁干涉仪压力传感器
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摘要
PURPOSE: A pressure sensor for a fabric-ferro interferometer having subminiature type high sensitivity optical fibers and a device for measuring pressure are provided to increase the sensitivity for precise pressure measurement in proportion to a distance between two mirrors with a fabric-ferro interferometer having subminiature type high sensitivity optical fiber. CONSTITUTION: A pressure sensor for a fabric-ferro interferometer having subminiature type high sensitivity optical fibers includes a fabric-ferro interferometer(54) having first and second mirrors(40,50) disposed in parallel to each other with a controllable interval, and an optical waveguide element of which refractivity and phase difference are larger than an air layer between the mirrors, and a diaphragm(20) connected to the second mirror of the interferometer to be applied with external pressure, wherein the optical waveguide element is optical fibers(10), the distance between the mirrors is proportional to the measuring sensitivity of the sensor, and the interferometer is surrounded by a protecting structure such as glass(60).
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