首页> 外国专利> PRESSURE SENSOR FOR FABRIC-FERRO INTERFEROMETER HAVING SUBMINIATURE TYPE HIGH SENSITIVITY OPTICAL FIBERS AND PRESSURE MEASURING DEVICE

PRESSURE SENSOR FOR FABRIC-FERRO INTERFEROMETER HAVING SUBMINIATURE TYPE HIGH SENSITIVITY OPTICAL FIBERS AND PRESSURE MEASURING DEVICE

机译:具有超小型微型高灵敏度光纤和压力测量装置的纤维-铁干涉仪压力传感器

摘要

PURPOSE: A pressure sensor for a fabric-ferro interferometer having subminiature type high sensitivity optical fibers and a device for measuring pressure are provided to increase the sensitivity for precise pressure measurement in proportion to a distance between two mirrors with a fabric-ferro interferometer having subminiature type high sensitivity optical fiber. CONSTITUTION: A pressure sensor for a fabric-ferro interferometer having subminiature type high sensitivity optical fibers includes a fabric-ferro interferometer(54) having first and second mirrors(40,50) disposed in parallel to each other with a controllable interval, and an optical waveguide element of which refractivity and phase difference are larger than an air layer between the mirrors, and a diaphragm(20) connected to the second mirror of the interferometer to be applied with external pressure, wherein the optical waveguide element is optical fibers(10), the distance between the mirrors is proportional to the measuring sensitivity of the sensor, and the interferometer is surrounded by a protecting structure such as glass(60).
机译:用途:用于具有超小型型高灵敏度光纤的织物-铁干涉仪的压力传感器和用于测量压力的装置被提供,以与具有超微型的织物-铁干涉仪的两个镜之间的距离成比例地增加用于精确压力测量的灵敏度。型高灵敏度光纤。构成:一种具有超小型高灵敏度光纤的织物铁干涉仪的压力传感器,其特征在于,织物铁干涉仪(54)具有彼此平行且间隔可控的第一和第二反射镜(40,50)。折射率和相位差大于反射镜之间的空气层的光波导元件,以及与干涉仪的第二个反射镜连接并施加外压的膜片(20),其中,光波导元件是光纤(10) ),反射镜之间的距离与传感器的测量灵敏度成正比,并且干涉仪被诸如玻璃(60)之类的保护结构所包围。

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