Effect of Particle Size Distribution on Filter Lifetime in Three Slurry Pump Systems

摘要

A diaphragm pump, bellows pump, and centrifugal pump were tested to determine how their use affected the lifetime of CMP3 filters in Semi-Sperse~® 12 slurry. The tests were continued until the ΔP across the filter increased by at least 10 psig or more than 3,000 tank turnovers in the system were achieved. The rates of ΔP increase measured using the diaphragm and bellows pumps were approximately 9 and 23 times higher than those measured when using the centrifugal pump. These results are consistent with particle size distribution measurements that showed the centrifugal pump generates fewer particles than the diaphragm or bellows pumps.