首页> 外文会议>Symposium on Multicomponent Oxide Films for Electronics held April 6-8,1999,San francisco,California,U.S.A. >PUlsed laser deposition of superconductor/ferromagnetic YBa_2Cu_3O_y/SrTiO_3/La_2/3Sr_1/3MnO_3 heterostructures
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PUlsed laser deposition of superconductor/ferromagnetic YBa_2Cu_3O_y/SrTiO_3/La_2/3Sr_1/3MnO_3 heterostructures

机译:超导体/铁磁YBa_2Cu_3O_y / SrTiO_3 / La_2 / 3Sr_1 / 3MnO_3异质结构的脉冲激光沉积

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YBa_2Cu_3O_y/SrTiO_3/La_2/3Sr_1/3MnO_3 heterostructures have been deposited on LaAlO_3(001) and SrTiO_3(001) substrates by pulsed laser deposition. First, the influence of deposition conditions on crystallinity and morphology of single LSMO films was examined. results were used for preparation of heterostructures in tri-layer and cross-strip geometry. Cross-srip geometry was defined by direct shadow mask patterning. Different characterization techniques have been used to determine and correlate the heterostructure properties. A complete analysis of the crystal structure has been carried out with a four-circle difractometer. morphology has been studied by scanning electron microscopy and atomic force microscopy in order to determine surface roughness and droplet density. Basic electrical properties of films have been determined.
机译:YBa_2Cu_3O_y / SrTiO_3 / La_2 / 3Sr_1 / 3MnO_3异质结构已通过脉冲激光沉积法沉积在LaAlO_3(001)和SrTiO_3(001)衬底上。首先,研究了沉积条件对单个LSMO膜的结晶度和形态的影响。结果用于制备三层和交叉带几何形状的异质结构。通过直接荫罩图案化来确定交叉裙的几何形状。已经使用不同的表征技术来确定和关联异质结构性质。晶体结构的完整分析已经用四圆衍射仪进行了。通过扫描电子显微镜和原子力显微镜研究了形态学,以确定表面粗糙度和液滴密度。已经确定了膜的基本电性能。

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