Unstable Etching Of Si(110)With Potassium Hydroxide

摘要

We present the experimental data for the morphological evolution of Si(l10) etched with Potassium Hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching, which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.