'In-situ' preparation of metal oxide thin films by inkjet printing acetates solutions

摘要

Direct printing of functional oxide thin films could provide a new route to low-cost, efficient and scalable fabrications of electronic devices. One challenge that remains open is to design the inks with long term stability for effective deposition of specific oxide materials of industrial importance. In this paper, we introduce a reliable method of producing stable inks for 'in-situ' deposition of oxide thin films by inkjet printing. The inks were prepared from metal-acetates solutions and printed on a variety of substrates. The acetate precursors were decomposed into oxide films during the subsequent calcination process to achieve the 'in-situ' deposition of the desired oxide films directly on the substrate. By this procedure we have obtained room temperature contamination free ferromagnetic spintronic materials like Fe doped MgO and ZnO films from their acetate(s) solutions. We find that the origin of magnetism in ZnO, MgO and their Fe-doped films to be intrinsic. For a 28 nm thick film of Fe-doped ZnO we observe an enhanced magnetic moment of 16.0 emu/cm~3 while it is 5.5 emu/cm~3 for the doped MgO film of single pass printed. The origin of magnetism is attributed to cat-ion vacancies. We have also fabricated highly transparent indium tin oxide films with a transparency ＞95% both in the visible and IR range which is rather unique compared to films grown by any other technique. The films have a nano-porous structure, an added bonus from inkjetting that makes such films advantageous for a broad range of applications.