Comparison Between WCC/DLC, CrN/DLC and RF Produced DLC Coatings

摘要

Recently DLC coatings have proceeded to large scale industrial usage. The two widely applied coatings are: 1) coatings produced by pure PACVD, utilizing e.g. Radio Frequency (13.56 MHz) plasma, and, 2) coatings produced in PVD equipment, utilizing reactive sputtering and switching over to e.g. Mid-Frequency PACVD for the a-C:H top coating. A comparison is made of typical representatives of the two classes. The mechanical properties like hardness, E-modulus, wear resistance, adhesion and the load carrying capability are compared.