SHAPE CHANGING MECHANISMS IN MICROPROFILE EXTRUSION

摘要

Profile extrusion is a well-established practice in the polymer industry. Adaptation of profile extrusion to microfabrication, however, is difficult due to scaling-related process changes. Particularly, the effect of surface tension increases as size reduces and could significantly contribute to cross-sectional shape change in microprofile extrusion. In this study, the role of surface tension in microprofile extrusion was numerically studied and compared with that of die swell. Strategies were proposed to reduce the surface tension influence and produce precision microprofiles.