Integrated microsystems for optical sensing and imaging applications

摘要

Compact optical systems generally form the backbone of integrated optoelectronic microsystems. Miniaturization as well as integration requirements result in system configurations with folded optical axis such as in planar integrated free-space optics. For optimum performance in such systems geometries, the surface profiles of the corresponding optical elements deviate from classical spherical or aspherical shapes. Optimized plane-symmetric or freeform optical elements are required instead. We discuss design, fabrication and characterization of freeform optical elements for the integration of optical microsystems. The systems performance is demonstrated for imaging as well as sensor applications.