AN INFLUENCE OF SUBSIDIARY ACTIVATION MODE ON THE DIAMOND CVD

摘要

The action of subsidiary activation, basically electrical, on various types of CVD-diamond is surveyed. Depending on the character and the direction of action on the system "crystallization medium - crystal" two opportunities are distinguished: action on gas phase and on the surface of a growing crystal. It is marked, that the influence of subsidiary activation on the rate of crystallization of diamond can be manifested in the greater degree at high temperatures of crystallization and high concentrations of carbon in the gas phase. At use of various methods of activation and/or the crystallization conditions the considerable gain (2-6 times) in the linear growth rate of diamond films, and also change of their quality can be observed.