SELF-CONSISTENT MODELING OF MODERATE PRESSURE H_2 PLASMAS OBTAINED IN DIAMOND DEPOSITION MICROWAVE REACTORS

摘要

This paper discusses a two-dimensional model for H_2-plasmas obtained under diamond deposition discharge conditions using a microwave cavity coupling system. The model includes an electromagnetic solver and a plasma transport sub-model which describes the coupled phenomena of chemistry, energy transfer and species and energy transport in non equilibrium H_2 plasmas. The plasma transport equations and the electromagnetic fields equations are solved simultaneously such that the coupling between the spatial distributions of the plasma composition and temperatures, and of the electromagnetic field is accounted for. Results showed that the spatial distributions of species density and plasma temperatures are non homogenous. An example illustrating how the present model may be used as an optimization tool for determining the input power value leading to the optimal ratio between the fluxes of H-atom at the deposition substrate and at the reactor wall is provided.