Porous silicon based Bragg reflectors and Fabry-Perot interference filters for photonic applications

摘要

Visible light emission from the porous silicon (PSi) formed by anodic etching of Si in HF solution has raised great interest in view of possible applications of Si based devices in optoelectronics. In particular, multilayers consisting of periodic repetition of two PSi layers whose refractive indices are different can be exploited to design interference filters for controlling the emission wavelength as well as for the spectral narrowing of the wide emission band of Psi. Fabry-Perot optical microcavities with an active layer of λ/2 or λ sandwiched between two Bragg reflectors, consisting of alternating layers of high and low refractive indices are fabricated on heavily doped p-type silicon. We have investigated the optical properties of these microstructures using reflectivity and photoluminescence measurements at various temperature.