Channeling radiation as an x-ray source for angiography x-ray lithography molecular structure determination and elemental analysis

摘要

Abstract: Synchrotron radiation of 33 keV ($lambda $APEQ 0.4 angstrom) has been tentatively employed for coronary angiography studies; the results were successful, but lack clinical quality. Synchrotron radiation has been proposed as a source for microlithography and the efficient production of integrated circuits, using energies of 0.5 - 2.5 keV ($lambda $APEQ 5 - 20 angstroms). This application, although not yet carried out in earnest, appeared promising enough so that a number of synchrotron sources dedicated to this purpose are now being set up worldwide. Such applications require storage rings for GeV electrons, costing $20 - 60 million each. Less expensive, lower energy linacs, affordable by individual hospitals or smaller institutions, can produce kev channeling radiation suitable for microlithography and angiography. Channeling-radiation intensities, especially for x-ray energies of some tens of keV and higher will surpass synchrotron-radiation intensities. We have carried out quantitative studies confirming the above conclusions regarding the comparison of channeling radiation and synchrotron radiation. We found that $LS 5 MeV electron linacs costing less than $1 million can generate few keV channeling radiation intensities comparable to that of synchrotron radiation, suitable for microlithography and calcium-based angiography, as well as x-ray diffraction structure analysis and elemental analysis by x-ray fluorescence. (For iodine-based angiography, 20 MeV linacs are required.) If transition radiation were used for the same purposes, more expensive linacs of an order of magnitude higher electron energy would be needed.!30