A three-level high fill-factor uncooled infrared microbolometer focal plane array

摘要

We have developed a three-level microbolometer uncooled infrared FPA(Focal Plane Array). The proposed structure features that the supporting arms structure is separated from the bridge structure using double sacrificial layers and thus, the optical fill-factor of the infrared detector increases effectively and the thermal isolation is maximized. Through several structural designs and tests, we have obtained an optimized three-level detector structure having a 92% optical fill-factor and fabricated a 256x256 microbolometer FPA. The performance of the proposed detector shows that it performs well as an effective electro-thermal structure for the highly integrated FPA.