High Dynamic Range 4Mpixel CMOS Image Sensor for Scientific Applications

摘要

As bio-technology transitions from research and development to high volume production, dramatic improvements in image sensor performance will be required to support the throughput and cost requirements of this market. This includes higher resolution, higher frame rates, higher quantum efficiencies, increased system integration, lower read-noise, and lower device costs. We present the performance of a recently developed low noise 2048(H) x 2048(V) CMOS image sensor optimized for scientific applications such as life science imaging, microscopy, as well as industrial inspection applications. The sensor architecture consists of two identical halves which can be operated independently and the imaging array consists of 4T pixels with pinned photodiodes on a 6.5um pitch with integrated micro-lens. The operation of the sensor is programmable through a SPI interface. The measured peak quantum efficiency of the sensor is 73% at 600nm, and the read noise is about 1.1e- RMS at 100 fps data rate. The sensor features dual gain column parallel ouput amplifiers with 11-bit single slope ADCs. The full well capacity is greater than 36ke-, the dark current is less than 7pA/cm~2 at 20℃. The sensor achieves an intra-scene linear dynamic range of greater than 91dB (36000:1) at room temperature.