Abstract: A family of backside illuminated CCD imagers with 6.6 $mu@m pixels has been developed. The imagers feature full 12 bit ($GRT 4,000:1) dynamic range with measured noise floor of $LS 10 e RMS at 5 MHz clock rates, and measured full well capacity of $GRT 50,000 e. The modulation transfer function performance is excellent, with measured MTF at Nyquist of 46% for 500 nm illumination. Three device types have been developed. The first device is a 1 K $MUL 1 K full frame device with a single output port, which can be run as a 1 K $MUL 512 frame transfer device. The second device is a 512 $MUL 512 frame transfer device with a single output port. The third device is a 512 $MUL 512 split frame transfer device with four output ports. All feature the high quantum efficiency afforded by backside illumination.!5
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机译：摘要：已经开发出了具有6.6μm@m像素的背面照明CCD成像器系列。成像仪具有完整的12位（$ GRT 4,000：1）动态范围，在5 MHz时钟速率下测得的本底噪声为$ LS 10 e RMS，测得的全阱容量为$ GRT 50,000 e。调制传递函数性能非常好，对于500 nm照明，奈奎斯特测得的MTF为46％。已经开发了三种设备类型。第一个设备是具有单个输出端口的1 K $ MUL 1 K全帧设备，可以作为1 K $ MUL 512帧传输设备运行。第二个设备是具有单个输出端口的512 $ MUL 512帧传输设备。第三个设备是具有四个输出端口的512 $ MUL 512分离帧传输设备。所有这些器件均具有背面照明所提供的高量子效率。！5
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