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Optical inspection of wide-gap semiconductors

机译:宽间隙半导体的光学检查

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Investigation of electronic kinetic processes in solid state material and especially in semiconductors has great importance because it provides information about the main fundamental characteristics of the material such as energy level structure, relaxation processes, Fermi surface shape, volume charge distribution, specific properties of charge carriers, etc. These parameters can be measured both using electrical and optical methods. The latter are preferable because they allow nondestructive testing of materials to be carried out. The dynamics of space-charge fields in wide-gap high-resistive materials is very slow (the Maxwell relaxation time is inversely proportional to the conductivity of the material). Utilization of conventional methods for the characterization of material parameters, for example, photoconductivity of the material, is difficult due to the influence of the internal space-charge field on the results of the measurement. There are two modern techniques for wide-gap materials investigation.of such measurements.
机译:固态材料尤其是半导体中电子动力学过程的研究非常重要,因为它提供了有关材料主要基本特征的信息,例如能级结构,弛豫过程,费米表面形状,体积电荷分布,电荷载流子的特定性质等等。这些参数可以使用电学和光学方法进行测量。后者是优选的,因为它们允许对材料进行无损检测。宽间隙高阻材料中的空间电荷场动力学非常慢(麦克斯韦弛豫时间与材料的电导率成反比)。由于内部空间电荷场对测量结果的影响,难以使用常规方法表征材料参数,例如材料的光电导性。有两种现代的技术可以用于宽间隙材料的测量。

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