Advanced Process Control Framework

摘要

In the past, materials and microelectronics fabrication equipment and processes have been developed in an ad hoc and experimental fashion, with considerable reliance on trial-and-error adjustments during a long period of "learning the process". Equipment control software is the minimal emphasis when comes to equipment design. The development of equipment supervisory control software to manage process variables, but not the product state variables during processing. However, the current equipment control approach cannot address the growing needs for smaller featrues and more precisely differentiated product characteristics.