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Method and apparatus for processing tool failure detection and control using an advanced process control (APC) framework
Method and apparatus for processing tool failure detection and control using an advanced process control (APC) framework
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机译:使用高级过程控制(apc)框架处理工具故障检测和控制的方法和装置
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摘要
A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.
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