Micro vibration and vibration sensitive equipment

机译：微振动和振动敏感设备

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摘要

It is essential for vibration sensitive equipment to take measures against micro vibration with considering their structrue and operation principles.

机译：对于振动敏感的设备，必须考虑到其结构和操作原理，采取措施防止微振动。

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来源
《SEMI(Semiconductor Equipment and Materials International) IC Seminar November 5, 1998 Taipei》|1998年|p.133-135|共3页
会议地点 Taipei(CT);Taipei(CT)
作者
Satoshi Togari;
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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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Micro vibration and vibration sensitive equipment

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