Design of A Nanometer Micropositioning Workpiece Table Based on Finite Element Method

摘要

This paper presents a kind of single PZT translator micropositioning workpiece table, which uses flexure hinges as preload mechanism and high precise ball bearing guides support mechanism. With the aid of Finite Element Analysis package, researches on the static and dynamic characters of the micropositioning workpiece table have been carried out. In the static analysis, study mainly focus on the static stiffness. While in the dynamic analysis, researches principally concentrate on the vibration mode, natural frequency and respondence of sinusoidal stimulation, and achieve the properties of the micropositioning workpiece table under the dynamic force. At last the reason for the large variety of the static and dynamic stiffness on the workpiece table has been analyzed.