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Introduction to Technology Relative to Ultra-precision Machine with Nanometer Feed

机译:纳米进给超精密机床技术介绍

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摘要

At present, the ultra-precision machining technology develops rapidly, especially with development in modern machining, measuring and control technology, this promotes more the development of ultra-precision machining. And the development of all kinds of technology has put forward higher demand on it. At present, people can achieve a nanometer feed control, and can remove material in nanometer magnitude from the surface of workpiece, obtain a surface quality of Ra1 ~ 2nm. The paper will give a brief introduction to some technologies used in developing NAM- 800. An ultra-precision machine mainly consists of the following components: ( 1 ) High-precision movement parts; ( 2 ) High-precision servo drive system and measuring feedback part; (3) Control system.
机译:目前,超精密加工技术发展迅速,特别是随着现代加工,测量和控制技术的发展,这进一步推动了超精密加工的发展。并且各种技术的发展对它提出了更高的要求。目前,人们可以实现纳米进料控制,并且可以从工件表面去除纳米级的材料,获得Ra1〜2nm的表面质量。本文将简要介绍用于开发NAM-800的一些技术。超精密机器主要由以下组件组成:(1)高精度运动部件; (2)高精度伺服驱动系统和测量反馈部分; (3)控制系统。

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