Numerical Study of Novel MEMS-Based Valveless Piezoelectric Micropumps in the Range of Low Voltages and Frequencies

摘要

This paper presents two piezoelectric based micropumps for biomedical applications. First, Single Diaphragm Micropump (SDM) was proposed as reference micropump. Second, Bi-diaphragm Micropump (BDM) was designed to increase the net flow rate. Essentially, the novelty of this work was that the BDM had two vibrational diaphragms that were placed in parallel. The sinusoidal voltage was applied with 180-degrees phase shift to BDM's piezoelectric actuators. Finally, the effect of electro-mechanical factors on the performance of micropumps was investigated by the finite element method. The maximum flow rate of SDM and BDM were $1.24imes 10^{-27}mathbf{m}^{3}/mathbf{cycle}$ and $1.51 imes 10^{-27}mathbf{m}^{3}/mathbf{cycle}$ respectively.