AN IMPROVED VALVELESS MICROPUMP WITH DOME SHAPED DIELECTRIC ELASTOMER DIAPHRAGM, PUMPING CHAMBER AND NOZZLE DIFFUSER AS FLOW CONTROL ELEMENT

摘要

The present invention relates to an improved valveless micropump with dome shaped dielectric elastomer diaphragm, pumping chamber and nozzle diffuser as flow control element. The pump comprising a upper housing (2) and a bottom housing (3). The upper housing (2) comprising a fluid pumping chamber (7) with a diaphragm as one of the boundary a nozzle diffuse or a micro channel (4) as a flow detecting elements and two reservoirs (11, 12) at the inlet and outlet of the micropump (1). Inlet (5) and outlet (6) are connected with small diameter tube for intake and delivery of fluid. The bottom housing (3) has a fluid chamber (8). The diaphragm is attached to the top of the chamber (8) with a prestreched passive elastomer layer (16) disposed above the diaphragm for insulation. The chamber (8) has a micro drilled hole (9) used for injecting pressurised fluid in the chamber (8) to make the diaphragm, a dome shaped. The two housings are assembled, sealed and screwed for preventing any leakage from the micropump. The diaphragm is sandwitched between two compliant electrodes (15). A conducting tape is connected with both electrodes for supplying electric field causing the diaphragm to have high stroke length providing higher stroke volume and higher flow rate for the micropump.