MICROROBOT ACTUATED BY SURFACE ACOUSTIC WAVES THEORY AND EXPERIENCE

摘要

Surface acoustic waves generated along two perpendicular directions are used to move a microrobot in a work section of several square centimeters with a high degree of resulution (nanometer). A mechanical model is developed to determine how the energy is transferred from the acoustic wave to the microrobot and to predict its displacement from the control signal transmitted through the surface acoustic wave. A good agreement is obtained between the theory and the experience.