OPTICAL DIAGNOSTICS OF NANOMETER DIELECTRIC FILMS BY COMBINING ELLIPSOMETRY AND DIFFERENTIAL REFLECTANCE

摘要

The effect of nanometer dielectric films on the ellipsometric parameters and reflectance of linearly polarized light is investigated within the framework of the perturbation theory. The novel approach is developed for simultaneous determining the thickness and dielectric constant of nanometer-scale films by the differential reflectance and ellipsometric measurements.