首页> 外国专利> Surface-emitting laser element including dielectric film selectively provided to control reflectance in emission region, surface-emitting laser array, optical scanner device, and image forming apparatus

Surface-emitting laser element including dielectric film selectively provided to control reflectance in emission region, surface-emitting laser array, optical scanner device, and image forming apparatus

机译:包括选择性地设置以控制发射区域中的反射率的介电膜的表面发射激光器元件,表面发射激光器阵列,光学扫描仪装置和图像形成设备

摘要

A disclosed surface-emitting laser element includes a substrate, multiple semiconductor layers stacked on the substrate including a resonator structure including an active layer, a semiconductor multilayer mirror on the resonator structure, and a confined structure where a current passage region is enclosed by at least an oxide generated by oxidation of part of a selective oxidation layer containing aluminum, an electrode provided around an emission region, and a dielectric film provided in a peripheral portion within the emission region and outside a central portion of the emission region to make a reflectance of the peripheral portion lower than that of the central portion. The dielectric film is arranged such that a reflectance of a high-order transverse mode in a second direction is higher than that in a first direction, and a width of the current passage region in the first direction is greater than that in the second direction.
机译:公开的表面发射激光器元件包括:基板;堆叠在该基板上的多个半导体层,包括谐振器结构,该谐振器结构包括有源层;在该谐振器结构上的半导体多层镜;以及其中电流通过区域至少被包围的封闭结构。一种氧化物,该氧化物是通过对包含铝的选择性氧化层的一部分进行氧化而生成的,在发射区域周围提供电极,并在发射区域内的外围部分和发射区域的中心部分之外提供介电膜,以使反射率达到外围部分低于中心部分。介电膜被布置为使得第二方向上的高阶横向模式的反射率高于第一方向上的反射率,并且第一方向上的电流通过区域的宽度大于第二方向上的电流通过区域的宽度。

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