LARGE OPTICAL ANISOTROPY OF 1D PHOTONIC CRYSTAL FABRICATED BY VERTICAL ETCHING OF SILICON

摘要

Periodic structures of deep narrow grooves with vertical walls were prepared by liquid anisotropic etching of silicon. It was shown experimentally that the obtained media possesses the properties of a negative uniaxial crystal with its optical axis lying in the wafer plane. These structures display a large optical anisotropy in the middle IR range of spectrum. The difference in the effective refractive indices of the ordinary and the extraordinary raysΔN≈1.5.