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机译:总览

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摘要

The papers in this volume were presented at the Advanced Workshop on Silicon Recombination Lifetime Characterization Methods held at Santa Clara, CA on 2-3 June, 1997. The workshop was sponsored by ASTM Committee Fl on Electronics and SEMI. In addition to the technical presentations and poster sessions, the workshop included two well-attended panel discussions, the impressions of which are provided in Appendix I.
机译:该卷中的论文已于1997年6月2-3日在加利福尼亚州圣塔克拉拉举行的硅重组寿命表征方法高级研讨会上发表。该研讨会由ASTM电子和SEMI委员会Fl赞助。除了技术演讲和海报发布会外,研讨会还进行了两次专家小组讨论,其印象在附录I中提供。

著录项

  • 来源
  • 会议地点 Santa Clara CA(US)
  • 作者单位

    Symposium chairman and co-editor Mitsubishi Silicon America Palo Alto, CA;

    Symposium co-chairman and co-editor Wacker Siltronic Corp.Portland, OR;

    Symposium co-chairman and co-editor MEMC Electronics Materials Inc.St. Peters, MO;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TN304.12;
  • 关键词

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