CVD OF HIGH PRECISION OPTICAL COATINGS

摘要

In this paper we describe how optical coatings can be deposited uniformly with a high precision and reproducibility on 3-dimensional substrates, such as spherical lenses, by CVD. We present results that will highlight some specific advantages of CVD over the traditionally used methods of e-beam evaporation and magnetron sputtering and we will show that CVD has tremendous potential for enhancing the quality of optical coatings and for making cost savings.