首页> 外文会议>Proceedings vol.2005-09; European Conference on Chemical Vapor Deposition(EURCVD-15); 20050905-09; Bochum(DE) >Transmission electron microscopy of pyrolytic carbon coatings deposited in a hot-wall reactor: Preferred orientation and stacking character of graphitic crystallites
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Transmission electron microscopy of pyrolytic carbon coatings deposited in a hot-wall reactor: Preferred orientation and stacking character of graphitic crystallites

机译:沉积在热壁反应器中的热解碳涂层的透射电子显微镜:石墨微晶的优选取向和堆积特性

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Pyrolytic carbon coatings onto graphite foils have been deposited using methane- or propane-hydrogen mixtures as precursors. The effect of the molecular structure of hydrocarbon precursor and deposition temperature on the microstructure of the coatings has been examined by transmission electron microscopy coupled with electron diffraction. The correlation between preferred orientation of graphitic domains at the μm-scale and their stacking character at the nm-scale is studied. With increasing deposition temperature, the preferred orientation observed on the μm scale is increased. High-textured coatings are formed from propane-hydrogen mixtures while low- and medium-textured coatings are obtained from methane-hydrogen mixtures. The degree of the preferred orientation is found to be inversely proportional to the diameter of the nm -sized graphitic domains, L_a, and values of the interplanar distance in domain, d_(002).
机译:已经使用甲烷或丙烷-氢混合物作为前体沉积了石墨箔上的热解碳涂层。碳氢化合物前体的分子结构和沉积温度对涂层微观结构的影响已通过透射电子显微镜和电子衍射相结合进行了检验。研究了微米级的石墨畴的优选取向与其在纳米级的堆积特性之间的相关性。随着沉积温度的升高,以微米为单位观察到的优选取向增加。高质地的涂层由丙烷-氢混合物形成,而低和中等质地的涂层由甲烷-氢混合物获得。发现优选取向的程度与纳米尺寸的石墨畴的直径L_a和畴中的晶面间距的值d_(002)成反比。

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