ELABORATION ON THE AUTOMATIC MODELING SYSTEM FOR REACTION MECHANISMS USING A NOVEL CALCULATION METHOD

摘要

Reproducing experimental results is the most important factor in deciding the performance of the automatic modeling system of reaction mechanisms in chemical vapor depositions (CVD). In this paper, we introduced a novel calculation method to reproduce deposition profiles in a macroscopic cavity (Macrocavity). Boundary value problems for estimating diffusion-reaction equations by iterations of numerical integrations were changed into problems of finding linear combinations of specific functions by genetic algorithms (GA). We demonstrated the validity of the proposed method and successfully achieved robust, accurate calculations along with reduced computing costs.