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Dominant recombination center is 6H-SiC

机译:复合中心为6H-SiC

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摘要

In this study a summary is presented of data on the recombination centers in 6H-SiC pn structures derived from current-voltage characteristics and diffusion lengths of minority charge carriers. The structures studied were prepared by sublimation epitaxy and liquid-phase epitaxy. The existence has been established and characteristics discussed of some types of centers manifestimg themselves in the recombination in the space-charge and quasineutral regions: these centers introduce a deep level near the midgap and shallow levels with a depth of 50-200 meV; the effective capture cross-section of the deep level decreases with increasing temperature; the parameters of the centers somewhat vary for structures prepared by different techniques.
机译:在这项研究中,总结了从电流-电压特性和少数载流子的扩散长度得出的6H-SiC pn结构重组中心的数据。研究的结构是通过升华外延和液相外延制备的。已经建立了存在,并且某些类型的中心的讨论特征在空间电荷和准中性区的重组中表现出来:这些中心在中间能隙附近引入了一个深能级,在50-200 meV的深度引入了浅能级。深层的有效捕获截面随温度升高而减小;对于通过不同技术制备的结构,中心的参数有所不同。

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