Fabrication of monolithic voltage controlled oscillator using selective-area metalorganic chemical vapor deposition

摘要

We have fabricated a fully monolithic voltage controlled oscillator (VCO) using selective-area metalorganic chemical vapor deposition (SMOCVD). In this structure, it is easy to integrate FETs and varactor diodes with low resistances. The oscillation frequency of the fabricated VCO varied from 4.37GHz to 4.927GHz. The SSBphase noise was-76dBC/Hz and-112dBC/Hz at 100KHz and 1MHz offset from carrier frequency, respectively.