Development of an Optical Measurement System for Five-Degrees-of- Freedom Error Motions of a Micro High-Speed Spindle

摘要

We have developed a measurement system to measure five-degrees-of-freedom error motions for a high-speed microspindle, and we revealed the influence of lens form error using ray tracing. In addition, by using the system for actual measurement, we demonstrate the utility of the system to measure spindle rotation errors.