CONTINUOUS CONTACT CONTROL FOR MICROCONTACT PRINTING USING PRECISION POSITIONING STAGE WITH OPTICAL FEEDBACK

摘要

A two degree-of-freedom roll manipulator has been designed and constructed for examining roll-based microcontact printing. The machine has high stiffness, small error motions, and submicron resolution through full state feedback control. Cameras mounted in the machine permit in-process observation of the stamp contact region. We have demonstrated improved disturbance rejection in the rolling process by using contact images in a real time feedback loop.