Remote control of a scanning electron microscope for research and teaching

摘要

The development and makeup of a real-time full remote control system for the Philips/FEI XL30FEG SEM in the University of Michigan Electron Microbeam Analysis Laboratory is described. The instrument was initially controlled via the campus local area Ethernet network and cable TV network. The latest implementation meploys Fast Ethernet, ATM and MPEG video encoding to effect the remote control via the computer network alone. In addition to remote teaching the instrument may be used for remote research collaborations. Example remote control demonstrations are included.