'Snap-Back' Study of PWM Micro-accelerometer

摘要

The nonlinear electromechanical dynamics model of PWM digital micro-accelerometer is developed and how to solve this nonlinear equation is presented in this paper. The simulation results from above model show that pulse-width occurs "snap-back", which affects the range and precision of the accelerometer greatly. By analyzing and calculating, the "snap-back" reason is found, and the essential condition of pulse-width, which keeps linear relationship with excitation acceleration, is concluded. Finally accelerometer pulse-width, which keeps linear relationship with exciting acceleration, is modulated.