A Traveling Wave Ultrasonic Motor Using Double-side Actuation Teeth

摘要

A traveling wave ultrasonic motor using double-side teeth actuation is designed and fabricated. Using ANSYS FEM software, vibration modes of the metal-piezoceremic composed plate stator are analyzed under piezoelectric coupled field. Working performance of the ultrasonic motor is tested through experiments. A piezoelectric element is integrated to the stator to detect the resonant stator of the motor. The detected signal has characteristics that can be used for automatic frequency tracking, which is beneficial for future control of the motor.