DISCUSSION ON PRINCIPLE OF THERMAL DIFFUSIVITYMEASUREMENT OF ULTRA-THIN FILMUSING AC CALORIMETRIC METHOD

摘要

Generally, ac calorimetric method is used to measure the thermal diffusivity of thin films with thernthickness of more than tens of microns. In this paper, a new attempt is made to extend the use of acrncalorimetric method to measure ultra-thin films. The specific sample is possible to be manufactured thatrnis ultra-thin in some certain area and with common thickness in other area. The principle of measuringrnthe thermal diffusivity of ultra-thin films is presented.