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A PROJECTED-OUT DATE MANAGEMENT STRUCTURE IN A WAFER FAB

机译:晶圆厂中预计的日期管理结构

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摘要

Projected-out date is the time that the fabrication of a lot is expected to be finished.rnProjected-out date management is a management (PDCA) process focused on the obtaining, evaluation,rnmodification, and release of a projected-out date. A projected-out date is not precise owing to manyrncauses including the inconsistency of human interventions, the emergence of hot lots, thernincompleteness of line-balancing worsened by line reentrancy, unexpected changes or fluctuations inrnproduction conditions, incomplete cycle time or stage cycle time statistics, and so on. The purpose ofrnthis study is to investigate these possible causes and to construct a whole structure of projected-outrndate management to aggregate and coordinate efforts and techniques in improving the accuracy of arnprojected-out date in a semiconductor fabrication plant. Based on this management structure, wernexpect that the overall efficiency and reliability of output projection in a fab can also be improved. Thernprojected-out date management structure is composed of four major parts: (1) projected-out daterndetermination; (2) projected-out date release; (3) projected-out date evaluation; (4) projected-out daternmodification.
机译:预计生产日期是指预期完成批量制造的时间。预计生产日期管理是一种管理(PDCA)流程,专注于获取,评估,修改和发布预计生产日期。由于许多原因导致计划外的日期不准确,原因包括人为干预不一致,出现热批,生产线折返加剧了生产线平衡的不完全,生产条件的意外变化或波动,周期时间或阶段周期时间统计不完整,等等。这项研究的目的是调查这些可能的原因,并构建计划过期管理的整体结构,以汇总和协调提高半导体制造厂计划过期日期准确性的工作和技术。基于这种管理结构,我们期望也可以提高晶圆厂输出投影的整体效率和可靠性。计划外日期管理结构由四个主要部分组成:(1)计划外日期确定; (2)预计发布日期; (3)预计日期评估; (4)修改日期。

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