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Slot-antenna-coupled microbolometers for far-infrared detection

机译:缝隙天线耦合的微辐射热计用于远红外检测

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Slot-antenna-coupled microbolometers were fabricated and detection properties for 118#mu#m-CH_3OH laser radiation were investigated. Bismuth was used as a bolometer material and vacuum-deposited on the fused quartz substrate. The DC responsivity of 250/W was obtained for the area of 4*6#mu#m~2 with 100nm layer-thickness and the responsivity was held constant up to 100KHz at least. Furthermore, the NEP fo about 4*10~(-8)W was obtained from noise characteristics ofBi bolometer. The responsivity of jthe fabricated slot-antenna-coupled microbolometer improved by 18.5dB compared to the Bi bolometer without the antenna under te irradiation of 118#mu#m-CH_3OH laser.
机译:制备了缝隙天线耦合测辐射热仪,研究了118#mu#m-CH_3OH激光辐射的探测特性。铋用作辐射热计材料,并真空沉积在熔融石英基板上。对于4×6#μm·m 2的区域,具有100nm的层厚度,获得250 / W的DC响应度,并且响应度至少在高达100KHz下保持恒定。此外,根据Bi辐射热计的噪声特性,获得了约4 * 10〜(-8)W的NEP。与没有天线的Bi辐射热计相比,在118#mu#m-CH_3OH激光辐照下,制成的缝隙天线耦合微辐射热计的响应度提高了18.5dB。

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