School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, China;
School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, China;
School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, China;
School of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, China;
State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;
TaN; film; mechanical property; residual stress; morphology;
机译:磁控溅射TaN薄膜的微观结构和力学性能
机译:直流磁控溅射TaN薄膜的相变力学性能研究:正交晶Ta4N相的超硬度评估
机译:氧气分压对感应耦合等离子体辅助射频磁控溅射沉积Al2O3薄膜力学性能的影响
机译:反应性溅射沉积锡/棕褐色多层薄膜的结构和力学性能
机译:溅射沉积的氮化物和氧化物超晶格薄膜的结构,力学性能和热性能
机译:氧溅射压力对气敏性ZnO薄膜结构形貌和光学性质的影响
机译:气压对溅射TaN薄膜力学性能的影响