TiN/TaN multilayers were grown by reactive magnetron sputtering on WC-Co sintered hard alloy and MgO(100) single crystal substrates. Multilayer structure and composition modulation amplitudes were studied using x-ray diffraction method. Hardness and elastic modulus were measured by nanoindentation tester. For bilayer thickness (A) larger than 80A, hardness are lower than rule-of-mixtures value of individual single layers, and increased rapidly with decreasing A, peaking at hardness values approx approx 33
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