FRACTURE STRENGTH OF POLYSILICON AT STRESS CONCENTRATIONS

摘要

Fracture strengths were measured for three shapes of brittle polycrystalline silicon specimens – straight, central-hole, andrndouble-notch. The local strengths at the stress concentrations are higher than the strength of the uniform specimens, whichrnimplies a size effect. Prediction of the local strength by Weibull statistics is shown to be successful. This paper is anrnabbreviated version of one to be published in the Journal of Microelectromechanical Systems in 2003 [1].