High performance gyro with fast startup time, high range, wide bandwidth, low noise and excellent vibration immunity

摘要

A low-cost, high-yield, low-power gyro is presented from which five high performance variants are created by altering operating conditions. Flexible design of the gyro and the excellent dynamic range is explained. The paper details the high performance aspects of each variant with results from large population of dies. Measured results show a start up time less than 3ms and gyro output nonlinearity less than 0.1% of the full scale specification up to at least 20,000°/sec. The gyro has 8–12°/hr Allen deviation performance with white noise of 0.01°/sec/√Hz and bandwidth of 2kHz.