Fabrication and characterization of long range surface plasmon devices based on metallic subwavelength gratings

摘要

In this paper, long range surface plasmon devices using metallic subwavelength gratings are experimentally demonstrated. Subwavelength gold gratings are fabricated with deep UV interference lithography. Long range surface plasmon device using these subwavelength gold gratings is characterized by measuring the surface plasmon resonance reflectance curve in an attenuated total reflection setup. Surface plasmon resonance curve with approximately ten times narrower angular width than that from long range surface plasmon propagating along metallic thin films has been observed experimentally.