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Effect of Indium doping on the Gas sensing behavior of Zinc oxide films obtained by Chemical spray pyrolysis method

机译:铟掺杂对化学喷雾热解法制备氧化锌薄膜气敏行为的影响

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摘要

NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.
机译:研究了喷雾热解法制备的氧化锌薄膜的NO 2气敏特性。膜厚度为约550nm。还研究了铟掺杂对传感器性能的影响。测量了在100–225°C温度范围内的感应行为,以找出最佳工作温度。

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