RECENT ADVANCES IN HIGH DENSITY MIM CAPACITORS USING ANODIC ALUMINUM OXIDE NANOLAYERS

摘要

A review of recent advances in high density MIM capacitors using anodic aluminum oxide is presented. The fabrication and characterization of capacitors using barrier-type anodic aluminum oxide are presented in comparison with devices previously fabricated using porous anodic aluminum oxide. The barrier-type devices arc shown to produce larger capacitance densities and better stability of operation with respect to frequency. In addition, a novel fabrication scheme for the MIM capacitors is demonstrated. This allows for the further increase of the capacitance density. It also allows the creation of nanostructured electrodes which increase the effective area of the capacitors.